Wen Hsin Chang

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 1:30 PM - 6:25 PM A302 (Building No. 6)

Symposium (Oral)
| Symposium
| Advanced Surface and Interface Technologies for Micro and Nanoscale Fabrication

[16p-A302-1~8] Advanced Surface and Interface Technologies for Micro and Nanoscale Fabrication

5:50 PM - 6:25 PM

[16p-A302-8] 3D Heterogenous Channel Integration Technology for CFET Performance Balance Engineering

〇Wen Hsin Chang¹, X. R. Yu^2,3, T. C. Hong^2,4, Y. J. Lee^2,4, T. S. Chao⁴, Y. H. Wang³, T. Maeda¹ (1.AIST, 2.TSRI, 3.NCKU, 4.NYCU)