Minoru Akutsu

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:30 AM - 11:30 AM PA01 (Poster)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication (Poster)

[17a-PA01-1~7] 7 Beam Technology and Nanofabrication (Poster)

9:30 AM - 11:30 AM

[17a-PA01-3] Dopant analysis examination by FIB-SIMS

〇Minoru Akutsu¹, Tomonori Hiki¹, Masao Yoshikawa¹ (1.ROHM Co., Ltd.)