Nachi Chaya

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 6:30 PM A404 (Building No. 6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[15p-A404-1~19] 6.1 Ferroelectric thin films

1:15 PM - 1:30 PM

△ [15p-A404-2] No heating deposition of HfO₂-CeO₂ ferroelectric thick films by sputtering method

〇(M1)Nachi Chaya¹, Koji Hirai¹, Shinnosuke Yasuoka¹, Kazuki Okamoto¹, Wakiko Yamaoka², Yukari Inoue², Hiroshi Funakubo¹ (1.Tokyo Tech., 2.TDK Corp.)