jumpei kito

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 11:30 AM A205 (Building No. 6)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[17a-A205-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:15 AM - 11:30 AM

△ [17a-A205-9] Preparation of TiN Films by DC Vacuum Arc Deposition System with a coiled anode

〇jumpei kito¹, Yoshinori Saiki¹, Kento Homma¹, Seiya Watanabe¹, Takahiro Bando¹, Toru Harigai¹, Hirofumi Takikawa¹, Hiroki Gima², Hiroaki Sugita² (1.Toyohashi Univ. Technol., 2.OSG)

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