Miho Fujimoto

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:30 PM - 3:30 PM PA02 (Poster)

Poster presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.3 Novel technologies and interdisciplinary engineering

[17p-PA02-1~8] 1.3 Novel technologies and interdisciplinary engineering

1:30 PM - 3:30 PM

[17p-PA02-7] XPS analysis of surface of the electron beam resist SML irradiated with O₂ plasma

〇Miho Fujimoto¹, Akihiro Matsutani¹ (1.Tokyo Tech.)