jinshan zhang

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 2:30 PM - 6:45 PM D519 (Building No. 11)

Oral presentation
| CS Code-sharing session
| 【CS.1】 Code-sharing Session of 2.3 & 7.4 &7.5

[16p-D519-1~15] CS.1 Code-sharing Session of 2.3 & 7.4 &7.5

3:00 PM - 3:15 PM

[16p-D519-3] In-situ observation technique of micro-modification patterns under particle beam writing by Ion Beam Induced luminescence (IBIL) analysis and imaging

〇(M2)jinshan zhang¹, Koki Usui¹, Ryota Kikuchi¹, Wataru Kada¹, Osamu Hanaizumi¹, Naoto Yamada², Takahiro Satoh², Yasuyuki Ishii² (1.Gunma Univ, 2.QST)

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