Tomohiro Tamano

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Speaker, Author, Co-Author

Sat. Mar 18, 2023 1:00 PM - 4:30 PM B401 (Building No. 2)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[18p-B401-1~13] 15.4 III-V-group nitride crystals

1:15 PM - 1:30 PM

[18p-B401-2] Fabrication of Multiple Polarity Inverted AlN Structures by Multiple Sputtering and High-Temperature Annealing

〇Tomohiro Tamano¹, Kanako Shojiki^2,3, Hiroto Honda³, Kenjiro Uesugi^4,5, Shiyu Xiao², Masahiro Uemukai³, Tomoyuki Tanigawa³, Ryuji Katayama³, Hideto Miyake² (1.Fac.of Eng.Mie Univ., 2.Grad.sch.of Eng.Mie Univ., 3.Grad.sch.of Eng.Osaka Univ., 4.MRPCO, 5.Grad.sch.of RIS.Mie Univ.)

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