Takayuki Ohta

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:30 PM - 3:30 PM PB03 (Poster)

Poster presentation
| 8 Plasma Electronics
| 8 Plasma Electronics (Poster)

[15p-PB03-1~15] 8 Plasma Electronics (Poster)

1:30 PM - 3:30 PM

[15p-PB03-6] Deposition of diamond-like carbon film by high power pulsed magnetron sputtering using unipolar double pulses

〇Takayuki Ohta¹, Hiro Kunieda¹, Akinori Oda², Hiroyuki Kousaka³ (1.Meijo Univ., 2.Chiba Inst. Technol., 3.Gifu Univ.)