Mitsunori Toyoda

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 9:00 AM - 12:30 PM E502 (Building No. 12)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[17a-E502-1~13] 7.1 X-ray technologies

9:00 AM - 9:15 AM

[17a-E502-1] Removal of Mo/Si Multilayer Coatings on Fused Silica Substrates

〇Mitsunori Toyoda¹, Ryo YOKOYAMA¹, Shuntaro WAKI¹, Toshiyuki KAKUDATE², Jun CHEN¹ (1.Faculty of Engineering, Tokyo Polytechnic Univ., 2.IMRAM, Tohoku Univ.)

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