Kirito Cho

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Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 11:30 AM B414 (Building No. 2)

Oral presentation
| 17 Nanocarbon Technology
| 17.3 Layered materials

[16a-B414-1~10] 17.3 Layered materials

9:30 AM - 9:45 AM

△ [16a-B414-3] WS₂ thin film deposition on Fin structure by low-temperature metal organic chemical vapor deposition

〇(M2)Kirito Cho¹, Hideaki Machida³, Masato Ishikawa³, Hiroshi Sudoh³, Hitoshi Wakabayashi⁴, Ryo Yokogawa^1,2, Naomi Sawamoto^1,2, Atsushi Ogura^1,2 (1.Meiji Univ., 2.MREL, 3.Gas-phase Growth Ltd., 4.Tokyo Tech)