Tomoaki Osumi

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:30 PM - 4:45 PM D209 (Building No. 11)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[15p-D209-1~12] 7.2 Applications and technologies of electron beams

3:45 PM - 4:00 PM

[15p-D209-9] Change in Contact Potential Difference of Reactive Sputter-Deposited Hafnium Nitride Thin Films by Thermal Treatment

〇Tomoaki Osumi^1,2, Masayoshi Nagao², Yasuhito Gotoh¹ (1.Kyoto Univ., 2.AIST)