Masami Aono

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

2:15 PM - 2:30 PM

[15p-A408-6] Deposition of amorphous carbon nitride thin films by pressure-gradient RF magnetron sputtering

〇Masami Aono¹, Masami Terauchi², Kyoji Morita³, Tasuku Inoue³, Kazuhiro Kanda³ (1.Kagoshima Univ., 2.IMRAM Tohoku Univ., 3.LASTI, Univ. Hyogo)