1:30 PM - 1:45 PM
△ [17p-B401-2] Analysis of alteration layer formed by treating AlN with saturated vapor pressure water
〇(M1)Eri Matsubara1, Ryota Hasegawa1, Toma Nishibayashi1, Ayumu Yabutani1, Ryoya Yamada1, Ryosuke Kondo1, Sho Iwaya1,2, Motoaki Iwaya1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Shinya Kumagai1, Takahiro Maruyama1, Shintaro Kobayashi3, Taiji Yamamoto3, Hideto Miyake2 (1.Meijo University, 2.Mie University, 3.Rigaku Corp.)