Naoki Takano

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 10:30 AM - 11:45 AM D209 (Building No. 11)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[15a-D209-1~5] 7.3 Micro/Nano patterning and fabrication

10:30 AM - 10:45 AM

[15a-D209-1] Fabrication of silicon nanodisk array by UV nanoimprint lithograpy

〇Naoki Takano¹, Hiromasa Niinomi¹, Iori Morita², Kazuhiro Gotoh³, Tomoya Oshikiri¹, Masaru Nakagawa¹ (1.IMRAM, Tohoku Univ., 2.RIEC, Tohoku Univ., 3.Grad. Sch. Eng., Nagoya Univ.)

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