Hideyuki Tanaka

→ Search for Hideyuki Tanaka in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 16, 2023 9:00 AM - 12:45 PM D519 (Building No. 11)

Oral presentation
| CS Code-sharing session
| 【CS.1】 Code-sharing Session of 2.3 & 7.4 &7.5

[16a-D519-1~14] CS.1 Code-sharing Session of 2.3 & 7.4 &7.5

12:00 PM - 12:15 PM

△ [16a-D519-12] Atomic layer Etching of metal films by neutral cluster beam and VUV light irradiations

〇Hideyuki Tanaka¹, Masaya Takeuchi¹, Noriaki Toyoda¹ (1.Univ Hyogo)