09:30 〜 11:30 ▲ [17a-PA02-8] Top-down Fabrication of Ge/Si core/shell Nanowire Channels for Vertical-type Field Effect Transistors 〇Chao Le1,2、Yonglie Sun1、Wipakorn Jevasuwan1、Naoki Fukata1,2 (1.NIMS、2.Univ. of Tsukuba)