Zhang Xinyue

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Speaker, Author, Co-Author

Fri. Mar 17, 2023 1:00 PM - 5:00 PM B414 (Building No. 2)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[17p-B414-1~15] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:15 PM - 2:30 PM

▲ [17p-B414-6] The effect of post metallization annealing sequence on the Pt gate etching immunity of MFSFET with ferroelectric non-doped HfO₂

〇Zhang Xinyue¹, Joong-Won Shin¹, Tanuma Masakazu¹, Ohmi Shun-ichiro¹ (1.Tokyo Inst. of Technology)