Hiromi Hayakawa

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Speaker, Author, Co-Author

Wed. Mar 15, 2023 1:00 PM - 6:30 PM A404 (Building No. 6)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[15p-A404-1~19] 6.1 Ferroelectric thin films

2:45 PM - 3:00 PM

[15p-A404-8] Improvement in ferroelectricity of Hf_0.5Zr_0.5O₂ thin film followed by nitrogen plasma treatment on bottom electrode

〇Hiromi Hayakawa¹, Sho Tanaka¹, Minoru Noda¹ (1.Kyoto Inst. Tech Univ.)