・Atomic Layer Deposition Tools/ GEMStar XT/XT-P： Benchtop ALD platform. Possible deposition materials are oxides such as TiO2 and SnO2, Nitride of TiN and metals such as Pt and Ru. ・Compact Thermal / UV Nanoimprint Tool： Simple Desktop Type Thermal UV imprinting tool. Possible to use imprint material up to 8 inches. ・HIGH-PERFORMANCE POLYMER RESIST： micro resist technology (MRT) develops, produces and supplies materials for microelectronic devices, semiconductor devices and MEMS products.