・Atomic Layer Deposition Tools/ GEMStar XT/XT-P: Benchtop ALD platform. Possible deposition materials are oxides such as TiO2 and SnO2, Nitride of TiN and metals such as Pt and Ru. ・Compact Thermal...
HIDEN ANALYTICAL Gas Analysis: Real time gas analysers that address the broadest application range, Catalysis and Thermal Analysis: Automated microreactors and mass spectrometers for catalyst resea...