[15a-A408-1~10] 6.2 Carbon-based thin films

[15a-A408-9] Characterization of Mosaic Diamond and HFCVD Diamond Layer by Confocal Raman Spectroscopy

〇Koji Tanaka¹, Shinya Ohmagari¹, Takehiro Shimaoka¹, Hitoshi Umezawa¹, Hideaki Yamada¹ (1.AIST)

Keywords:Confocal Raman Sepctroscopy, Mosaic Diamond, Hot Filament

Recently, mosaic diamond wafer with an area of a few inches has been developed using the MWCVD method. The primal concern of their applicabilitu is the existence of coalescence bounday regions where identical seed substrates are conjoined. The HFCVD method is one way to overcome these disadvantages. In this study, crystallographic characteristics of mosaic diamond substrate and W incorporated HFCVD epilayer were investigated by using cofocal Raman spectroscopy.