[15a-A501-1~6] 3.10 Photonic structures and phenomena (formerly 3.11)

[15a-A501-5] Double-slab 1D rib photonic crystal cavity depletion-mode p-n electro-optic modulator

Lois Talli¹, 〇Eiichi Kuramochi^1,2, Shota Kita^1,2, Kengo Nozaki^1,2, Akihiko Shinya^1,2 (1.NTT-BRL, 2.NTT-NPC)

Keywords:photonic crystal, silicon photonics, photonics chip

We propose a CMOS fabrication compatible compact 1D nanocavity electro-optic modulator featuring a double-slab structure for vertical pn junction formation and electrode contact into the resonator as an EO modulator capable of high-speed modulation side-coupled with a silicon nano-waveguide. 3D electromagnetic device simulations based on the finite element method revealed that the designed device exhibits wavelength shift, insertion loss, and extinction ratio comparable to that of a micro ring resonator EOM at small swinging bias voltage of about 1V.