The 70th JSAP Spring Meeting 2023

Presentation information

Poster presentation

17 Nanocarbon Technology » 17 Nanocarbon Technology (Poster)

[15a-PA01-1~56] 17 Nanocarbon Technology (Poster)

Wed. Mar 15, 2023 9:30 AM - 11:30 AM PA01 (Poster)

9:30 AM - 11:30 AM

[15a-PA01-31] Effect of electron beam irradiation on graphene with its electrical properties

Masaaki Norimatsu1, Masako Kataoka1, Hiroyuki Aso1, Shoichi Suda1, Kenjiro Hayashi1, 〇Daiyu Kondo1, Shintaro Sato1 (1.Fujitsu)

Keywords:graphene, electron beam irradiation, electrical property

本発表では、電子線照射のグラフェン素子への悪影響を抑えることを目的に、単層グラフェン素子への電子線照射の効果を電気特性により評価したので詳細を報告する。