9:30 AM - 11:30 AM
[15a-PA01-50] Area-controlled Soft Contact Probe: Non-Destructive Electric Contact to Fragile Specimens
Keywords:non-destructive contact, electric property measurements, extremely thin films
Soft probe which contact with fragile speciment without damages has been developed so far. This time, the contact area-controlled sof probe has been developed without costly llthograpy methods.