[15a-PA01-1~56] 17 Nanocarbon Technology (Poster)

[15a-PA01-50] Area-controlled Soft Contact Probe: Non-Destructive Electric Contact to Fragile Specimens

〇Michiko Yoshitake¹, Kaori Omata², Hideyuki Kanematsu² (1.NIMS, 2.NIT-Suzuka)

Keywords:non-destructive contact, electric property measurements, extremely thin films

Soft probe which contact with fragile speciment without damages has been developed so far. This time, the contact area-controlled sof probe has been developed without costly llthograpy methods.