The 70th JSAP Spring Meeting 2023

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

3:45 PM - 4:00 PM

[15p-A408-11] Elucidation of PTFE/a-C:F thin film growth mechanism by low-energy electron beam irradiation on fluorocarbon condensed layer

〇Koki Akiyama1, Toshihiro Mitani1, Tetsuya Sato1, Yuichiro Shiozawa2, Yoshinobu Uegaki2 (1.Univ. of Yamanashi, 2.Yamanashi Industrial Technology Center)

Keywords:cryogenic, substrate bias, fluorocarbon