The 70th JSAP Spring Meeting 2023

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15p-A408-1~14] 6.2 Carbon-based thin films

Wed. Mar 15, 2023 1:00 PM - 4:45 PM A408 (Building No. 6)

Kazuhiro Kanda(Univ. of Hyogo), Toru Harigai(Toyohashi Univ. of Tech.)

4:15 PM - 4:30 PM

[15p-A408-13] Fabrication of field-effect transistors using carbon nitride films

〇Masaki Tachibana1, Kota Higuchi1, Noriyuki Urakami1,2, Yoshio Hashimoto1,2 (1.Shinshu Univ., 2.Shinshu Univ. RISM)

Keywords:graphitic carbon nitride, high-k