[15p-A408-1~14] 6.2 Carbon-based thin films

[15p-A408-2] Chemical bonding evaluation of DLC films using HiPIMS and high frequency HiPIMS methods

〇(DC)Hiroyuki Fukue¹, Tatsuyuki Nakatani¹, Tadayuki Okano², Masahide Kuroiwa², Shinsuke Kunitsugu³, Susumu Takabayashi⁴, Hiroki Oota⁵, Ken Yonezawa^5,1 (1.Okayama Univ. of Sci., 2.Tokyo Electronics Co., Ltd., 3.Ind. Technol. Cent. Okayama Pref., 4.National Inst. Technol., Ariake College, 5.Kenix Corporation)

Keywords:diamond-like carbon, X-ray photoelectron spectroscopy

We have been developing a new HiPIMS (High-Power Impulse Magnetron Sputtering) method, HF (High Frequency)-HiPIMS power supply, for further functionalization of thin films. In this study, we report on the chemical bonding of DLC (Diamond-Like Carbon) films using conventional HiPIMS and HF-HiPIMS methods. DLC films deposited by HF-HiPIMS method increased diamond bonding compared to those deposited by conventional HiPIMS method. Therefore, the effectiveness of the HF-HiPIMS method was confirmed.