[15p-A408-1~14] 6.2 Carbon-based thin films

△ [15p-A408-4] Thermal decomposition process of highly-hydrogenated diamond-like carbon films (2)

〇(M1)Daisuke Niwa¹, Tomohiro Mishima¹, Koji Nakanishi¹, Naoki Fukumuro², Tsuneo Suzuki³, Kazuhiro Kanda¹ (1.LASTI,Univ.Hyogo, 2.Eng.Univ.Hyogo, 3.Nagaoka.Univ.Tech)

Keywords:highly-hydrogenated diamond-like carbon films, Thermal decomposition

Previous studies of highly-hydrogenated diamond-like carbon (DLC) films with hydrogen content exceeding 40% have shown that hydrogen desorption from highly-hydrogenated DLC films occurs at around 360°C and hydrocarbon desorption at around 480°C as a result of temperature increase. In this study, we investigated the compositional and structural changes of highly-hydrogenated DLC films with increasing temperature by Rutherford backscattering and elastic recoil scattering spectroscopy (RBS/ERDA) and X-ray absorption near edge structure (XANES) and discussed the thermal decomposition process. The results show that the hydrogen content in RBS/ERDA decreases between 300°C and 400°C and between 450°C and 550°C. The hydrogen content in RBS/ERDA decreases between 300°C and 400°C, and between 450°C and 550°C, respectively. In XANES, the percentage of carbon atoms in sp² hybrid orbitals increases after desorption. From this result, it was found that the desorption process is consistent with the temperature rise desorption experiment and that the carbon atoms are recombined as double bonds after desorption.