5:30 PM - 5:45 PM
[15p-A502-17] Observation of surface condition of silicon by Atmospheric Plasma Jet toward Heterogeneous Material-integrated Photonic Circuits
Keywords:Heterogeneous Integration, Atmospheric plasma
Oral presentation
3 Optics and Photonics » 3.14 Silicon photonics and integrated photonics (formerly 3.15)
Wed. Mar 15, 2023 1:10 PM - 6:00 PM A502 (Building No. 6)
Shota Kita(NTT), Tomohiro Kita(Waseda Univ.), Taichiro Fukui(Univ. of Tokyo)
5:30 PM - 5:45 PM
Keywords:Heterogeneous Integration, Atmospheric plasma