The 70th JSAP Spring Meeting 2023

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3 Optics and Photonics » 3.14 Silicon photonics and integrated photonics (formerly 3.15)

[15p-A502-1~18] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

Wed. Mar 15, 2023 1:10 PM - 6:00 PM A502 (Building No. 6)

Shota Kita(NTT), Tomohiro Kita(Waseda Univ.), Taichiro Fukui(Univ. of Tokyo)

5:30 PM - 5:45 PM

[15p-A502-17] Observation of surface condition of silicon by Atmospheric Plasma Jet toward Heterogeneous Material-integrated Photonic Circuits

〇Koki Hihara1, Motoaki Yamauchi1, Akitoshi Okino1,2, Nobuhiko Nishiyama1,2,3 (1.Tokyo Tech, 2.IIR, 3.PETRA)

Keywords:Heterogeneous Integration, Atmospheric plasma