6:15 PM - 6:30 PM
[15p-B309-18] High Current and Low Voltage Discharge from DC Plasma Source with Boron-Doped Diamond Hollow Cathode
Keywords:plasma source, electron source, diamond
We develop a plasma source which utilizes properties of diamond such as high electron emission yield by a negative electron affinity, a high sputtering resistance against ion bombardment, a high melting point, and a high thermal conductivity. A DC discharge cathode is prototyped to obtain efficient ionization and high secondary electron emission yield which are realized by a hollow cathode with an axial magnetic field and with a boron-doped diamond electron emission layer coated inside a Mo cylinder cathode. As a result, we observed a DC discharge mode with a peak current of 100 A and an anode-cathode voltage of 90 V in hydrogen at 30 Pa.