3:00 PM - 3:15 PM
[15p-B309-7] Diagnosis of Spatial Distribution of Vibrational and Rotational Temperatures of Nitrogen Inductively Coupled Plasma by Tomographic Optical Emission Spectroscopic Measurement
Keywords:optical emission spectroscopic measurement, tomography, nitrogen inductively coupled plasma
To gain a better understanding of discharges specific to molecular gases, it is important to investigate the characteristics of nitrogen plasma, as a typical example. In inductively coupled plasma (ICP), which is applied to semiconductor etching processes, the spatial distribution of rotational temperature that approximates the gas temperature is crucial. In this study, nitrogen inductively coupled plasma was measured by tomographic optical emission spectroscopy. The spatial distribution of vibrational and rotational temperatures of N2 and N2+ were diagnosed by spectral fitting.