[15p-D419-1~8] 15.1 Bulk crystal growth

[15p-D419-5] Numerical analysis of heat and mass transfer of Ga₂O₃ grown by skull melting method

〇Koichi Kakimoto¹, Isao Takahashi^1,2, Taketoshi Tomida², Yusuke Kida², Kei Kamada^1,2, Satoshi Nakano³, Akira Yoshikawa^1,2,4 (1.NICHe, Tohoku Univ., 2.C&A Co., 3.RIAM, Kyushu Univ., 4.IMR, Tohoku Univ.)

Keywords:Ga2O3, simulation

We carried out the study of heat and mass transfer in a furnace of a skul melting method by using a global model. Temperature distribution in the furnace depends on RF frequency of heating. The hot melt sits on the solid due to a cooling effect to a pedestal. Then, flow velocity os small as the order of several cm/s.