The 70th JSAP Spring Meeting 2023

Presentation information

Print

Oral presentation

21 Joint Session K "Wide bandgap oxide semiconductor materials and devices" » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[15p-E102-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Wed. Mar 15, 2023 1:30 PM - 6:15 PM E102 (Building No. 12)

Mamoru Furuta(Kochi Univ. of Tech.), Keisuke Ide(Tokyo Tech), Ken Goto(Tokyo Univ. Agri. and Tech.)

5:00 PM - 5:15 PM

▼ [15p-E102-13] The R[O2]% Ratio Effect on the Optical Properties of AgxO Thin Films Grown by RFM-Sputtering

〇(DC)Xiaojiao Liu1, Tatsuya Yasuoka1, Li Liu2, Toshiyuki Kawaharamura1,2 (1.Kochi Univ. of Tech., 2.Res. Inst.)

Keywords:AgxO thin films, Sputtering, Band gap