[15p-PA03-1~18] 12.1 Fabrications and Structure Controls

[15p-PA03-12] Fabrication of vanadium oxide thin films by a chemical solution deposition method and its applications for pH sensor with high-sensitivity

〇(B)Yoshiki Tate¹, Ryo Michibata¹, Kanaru Makino¹, Yuichi Hirofuji¹, Kazuto Koike¹, Nobuya Hiroshiba¹ (1.NMRC, OIT)

Keywords:biosensor, vanadium oxides, extended gate FET

Our final goal of this study is to develop a biosensor with high sensitivity utilizing human body fluids such as sweat and tears. In this study, we focused on vanadium oxide as a basic sensing material for biosensors. We fabricated a prototype EGFET-type pH sensor using an n-channel MOSFET with a thin vanadium oxide film as an extended gate (EG) electrode fabricated by a chemical solution deposition method. The response of the prototype EGFET-type pH sensor to pH change was investigated.