[15p-PB03-1~15] 8 Plasma Electronics (Poster)

[15p-PB03-15] Substrate Temperature Dependence of SnO₂ Thin Films Prepared

〇Yuma Kameda¹, Yasushi Inoue¹, Osamu Takai² (1.Chiba Inst. Technol., 2.Kanto Gakuin Univ.)

Keywords:Sputtering method, SnO2, Glancing-angle deposition

SnO₂ has been utilized as a gas-sensing material. In this study, microstructured SnO2 films were fabricated by glancing-angle sputtering. The SnO₂ films had a dense columnar structure. Substrate heating in grazing incidence sputtering of SnO₂ films was shown to be effective for improving crystallinity and preferential orientation but not for discrete columnar structuring at the deposition pressures in this study.