[16a-A307-1~11] CS.8 Code-sharing Session of 12.6 & 12.7

[16a-A307-4] Development of Nanometer-Planar DNA Thin Solid Films via Laser Molecular Beam Deposition Method and their Application to Methanol Detection Sensors

Tomohiro Murata^1,2, Kosuke Minami², Tomohiko Yamazaki², Tomomasa Sato³, Hideomi Koinuma⁴, Katsuhiko Ariga^2,1, 〇Nobuyuki Matsuki³ (1.The Univ. of Tokyo, 2.NIMS, 3.Kanagawa Univ., 4.SCT Inc.)

Keywords:DNA, Laser deposition, Sensor

To apply DNA to electronic devices, it is desirable to be able to stack heterogeneous films and to perform patterning processes, which requires the formation of flat thin films at the nanometer level. In this study, by employing the laser molecular beam deposition (LMBD) method, we have obtained DNA thin solid films with an average root-mean-square surface roughness of 7.4 nm. Quartz crystal microbalance sensors fabricated using these thin films were found to have excellent methanol detection characteristics.