[16a-A402-7~7] 8.7 Plasma Electronics Invited Talk

[16a-A402-7] [INVITED] Evolution of Plasma Electronics by Radical Control

〇Masaru Hori¹ (1.Nagoya Univ.)

Keywords:plasma

Plasma electronics is an interdisciplinary science that creates new value in various fields, ranging from semiconductors and materials to the environment and biotechnology. In this science, attention has been paid to understanding and controlling the interaction of radicals with solids and liquids, and radical reactions in vivo induced by radicals in plasmas. In this talk, the behavior of radicals in plasmas will be systematically described and the evolution of plasma electronics by controlling radicals will be discussed.