Integration Technology for Smart Skin Display I: Heterogeneous Stacking of 3D-IC and Micro-LED with Room-Temperature Cu Direct Bonding

Yuki Susumago; Tadaaki Hoshi; Chang Liu; JIAYI Shen; Atsushi Shinoda; Hisashi Kino; Tetsu Tanaka; Takafumi Fukushima

Presentation information

Oral presentation

12 Organic Molecules and Bioelectronics » 12.3 Functional Materials and Novel Devices

[16a-B409-1~9] 12.3 Functional Materials and Novel Devices

Thu. Mar 16, 2023 9:00 AM - 11:30 AM B409 (Building No. 2)

Akito Masuhara(Yamagata Univ.), Jun Matsui(Yamagata Univ.)

9:00 AM - 9:15 AM

△ [16a-B409-1] Integration Technology for Smart Skin Display I: Heterogeneous Stacking of 3D-IC and Micro-LED with Room-Temperature Cu Direct Bonding

〇Yuki Susumago¹, Tadaaki Hoshi¹, Chang Liu¹, JIAYI Shen¹, Atsushi Shinoda², Hisashi Kino³, Tetsu Tanaka^1,3, Takafumi Fukushima^1,3 (1.Eng., Tohoku Univ., 2.Eng.,Tohoku Univ., 3.Bio. eng., Tohoku Univ.)

Keywords:Flexible hybrid electronics, Micro-LED

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