[16a-D411-1~7] 9.4 Thermoelectric conversion

[16a-D411-3] Development of thin-film-based in-plane π-type thermoelectric devices by microfabrication

〇Isao Ohkubo¹, Masayuki Murata², Akihiko Ohi¹, Mariana S. Lima^1,3, Takeaki Sakurai³, Takashi Aizawa¹, Takao Mori¹ (1.NIMS, 2.AIST, 3.Univ. of Tsukuba)

Keywords:Thermoelectric devices, Thin films, Microfabrication

Miniaturized in-plane p-type thermoelectric devices based on an epitaxial thin film of the II–IV compound thermoelectric semiconductor Mg₂Sn_0.8Ge_0.2 were developed utilizing the microfabrication techniques of photolithography and dry etching. Highly reliable thermoelectric device operation was successfully achieved. The microfabricated thermoelectric device generated a relatively high output voltage of 0.58 V and an output power of 0.6 mW, corresponding to a comparatively high output power density of 21 mW·cm⁻². The successful demonstration of a microfabricated thin-film-based thermoelectric device paves the way toward novel thermoelectric applications for self-powered Internet of Things devices and systems, as well as applications involving the effective use of the waste thermal energy generated from high heat density during the operation of electronic devices and systems.