The 70th JSAP Spring Meeting 2023

Presentation information

Oral presentation

9 Applied Materials Science » 9.4 Thermoelectric conversion

[16a-D411-1~7] 9.4 Thermoelectric conversion

Thu. Mar 16, 2023 9:45 AM - 11:45 AM D411 (Building No. 11)

Haruhiko Udono(Ibaraki Univ.)

10:15 AM - 10:30 AM

[16a-D411-3] Development of thin-film-based in-plane π-type thermoelectric devices by microfabrication

Isao Ohkubo1, Masayuki Murata2, Akihiko Ohi1, Mariana S. Lima1,3, Takeaki Sakurai3, Takashi Aizawa1, Takao Mori1 (1.NIMS, 2.AIST, 3.Univ. of Tsukuba)

Keywords:Thermoelectric devices, Thin films, Microfabrication

Miniaturized in-plane p-type thermoelectric devices based on an epitaxial thin film of the II–IV compound thermoelectric semiconductor Mg2Sn0.8Ge0.2 were developed utilizing the microfabrication techniques of photolithography and dry etching. Highly reliable thermoelectric device operation was successfully achieved. The microfabricated thermoelectric device generated a relatively high output voltage of 0.58 V and an output power of 0.6 mW, corresponding to a comparatively high output power density of 21 mW·cm−2. The successful demonstration of a microfabricated thin-film-based thermoelectric device paves the way toward novel thermoelectric applications for self-powered Internet of Things devices and systems, as well as applications involving the effective use of the waste thermal energy generated from high heat density during the operation of electronic devices and systems.