The 70th JSAP Spring Meeting 2023

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16 Amorphous and Microcrystalline Materials » 16.1 Fundamental properties, evaluation, process and devices in disordered materials

[16a-D505-1~11] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

Thu. Mar 16, 2023 9:00 AM - 12:00 PM D505 (Building No. 11)

Nobuaki Terakado(Tohoku Univ.), Tsuyoshi Honma(Nagaoka Univ. of Tech.), Tetsuo Kishi(Tokyo Institute of Technology)

11:45 AM - 12:00 PM

[16a-D505-11] Fabrication of aluminum silicate film on paper fibers by room-temperature atomic layer deposition

〇Fumihiko Hirose1, Takeru Saito1, Ryo Miyazawa1, Kentaro Saito1 (1.Yamagata Univ.)

Keywords:RT atomic layer deposition, aluminum silicate, fiber

Aluminum silicate is a combination material of silcon and aluminum oxides. In our laboratory, the room temperature atomic layer depostion has been developed to offer the aluminum silicate surface on paper fibers. In this conference, we disclose the related experimental results about the aluminun silicate coated fibers.