The 70th JSAP Spring Meeting 2023

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[16a-D511-1~10] 15.5 Group IV crystals and alloys

Thu. Mar 16, 2023 9:00 AM - 11:30 AM D511 (Building No. 11)

Kentarou Sawano(Tokyo City Univ.)

11:15 AM - 11:30 AM

[16a-D511-10] Formation of Ultra-thin Nickel Silicide on SiO2 using Si/Ni/Si Structures
with different Thickness

〇Keisuke Kimura1, Noriyuki Taoka1, Shunsuke Nishimura1, Akio Ohta1, Katsunori Makihara1, Seiichi Miyazaki1 (1.Grad. Sch. of Eng., Nagoya Univ.)

Keywords:Ultra-thin, XPS, Nickel Silicide