[16a-E102-1~6] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[16a-E102-3] State of mist droplets in the reactor of mist CVD

〇Keita Kusaka¹, Ryousuke Kaji¹, Toshiyuki Kawaharamura^1,2 (1.Kochi Univ. of Tech., 2.Res. Inst.)

Keywords:mist CVD, Leidenfrost, microdroplet