[16a-PA06-1~13] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

[16a-PA06-2] Thickness Distribution Measurement for the Thin film with a Transmission Mueller Matrix Microscope

〇(BC)Jin Nagase¹, Yoriatsu Kitamura¹, Keisuke Arimoto¹, Eiichi Kondoh¹, Lianhua Jin¹, Bernard Gelloz² (1.Univ. of Yamanashi, 2.Nagoya Univ.)

Keywords:Mueller Matrix, Ellipsometry measurement, Thin film