[16a-PA06-1~13] 3.7 Optical measurement, instrumentation, and sensor (formerly 3.8)

[16a-PA06-8] Optical cavity type of sensor elements for a wide range of hydrogen gas detection

〇Koki Takahashi¹, Nobuya Seko¹, Koji Shigemura¹, Satoshi Miura¹, Haruki Yamane², Satoshi Yanase², Shingo Takahashi², Kiyoshi Yamakawa² (1.Tianma Japan, 2.Akita Ind. Tech.)

Keywords:hydrogen gas sensor, optical interference, cavity

We investigated hydrogen gas sensors with high sensitivity using the optical cavity effect in [hydrogen sensing (reflective)/optical interference/half mirror] multilayered films. In an oblique-incidence optical system, p-polarized light and s-polarized light indicate different interference conditions in the optical cavity. The hydrogen gas measurement was demonstrated by irradiating the multilayered film with linearly polarized light and measuring the intensity change of reflected p- and s-polarized light due to the reaction between hydrogen gas and the sensing layer.