The 70th JSAP Spring Meeting 2023

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Poster presentation

13 Semiconductors » 13.2 Exploratory Materials, Physical Properties, Devices

[16a-PB05-1~5] 13.2 Exploratory Materials, Physical Properties, Devices

Thu. Mar 16, 2023 9:30 AM - 11:30 AM PB05 (Poster)

9:30 AM - 11:30 AM

[16a-PB05-4] Evaluation of Al diffusion depth in Mg2Si substrate by 4-point probe method

〇Kaito Ojima1, Rikuto Nakamura1, Haruhiko Udono1 (1.Ibaraki Univ.)

Keywords:4-point probe method