4:30 PM - 4:45 PM
[16p-A301-9] Low contact resistivity at non-alloyed contacts on heavily P+-implanted SiC
Keywords:SiC, ohmic contacts, contact resistivity
Oral presentation
13 Semiconductors » 13.7 Compound and power devices, process technology and characterization
Thu. Mar 16, 2023 4:00 PM - 5:30 PM A301 (Building No. 6)
Katsuhiro Kutsuki(Toyota Central R&D Labs.)
4:30 PM - 4:45 PM
Keywords:SiC, ohmic contacts, contact resistivity