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[16p-A401-14] Protective effect of single- and multi-layer gas barrier films formed by Cat-CVD for perovskite layers
Keywords:perovskite
The effect of the gas barrier film on the degradation rate of the perovskite film was investigated for the formation of monolayer SiNx and multilayer SiOxNy/SiNx gas barrier films by Cat-CVD to suppress the degradation of MAPbI3 under atmospheric conditions. The results of X-ray diffraction and reflection/transmission spectra show that the gas barrier film improves the stability of MAPbI3, since no PbI2 peak is observed even after 1000 h of exposure to the atmosphere. It was also confirmed that the smaller the H2 flow rate during film deposition, the higher the absorption rate after 1000 h of atmospheric exposure for both monolayer and multilayer than for other samples. This suggests that H radicals produced by H2 decomposition may affect MAPbI3.